<?xml version="1.0" encoding="UTF-8"?><urn:ContractAwardNotice xmlns:cac="urn:oasis:names:specification:ubl:schema:xsd:CommonAggregateComponents-2" xmlns:cbc="urn:oasis:names:specification:ubl:schema:xsd:CommonBasicComponents-2" xmlns:efac="http://data.europa.eu/p27/eforms-ubl-extension-aggregate-components/1" xmlns:efbc="http://data.europa.eu/p27/eforms-ubl-extension-basic-components/1" xmlns:efext="http://data.europa.eu/p27/eforms-ubl-extensions/1" xmlns:ext="urn:oasis:names:specification:ubl:schema:xsd:CommonExtensionComponents-2" xmlns:urn="urn:oasis:names:specification:ubl:schema:xsd:ContractAwardNotice-2"><ext:UBLExtensions><ext:UBLExtension><ext:ExtensionContent><efext:EformsExtension><efac:NoticeResult><cbc:TotalAmount currencyID="EUR">990099.01</cbc:TotalAmount><efac:LotResult><cbc:ID>RES-1477</cbc:ID><cbc:TenderResultCode listName="winner-selection-status">selec-w</cbc:TenderResultCode><efac:LotTender><cbc:ID>TEN-7542</cbc:ID></efac:LotTender><efac:ReceivedSubmissionsStatistics><efbc:StatisticsCode listName="received-submission-type">tenders</efbc:StatisticsCode><efbc:StatisticsNumeric>1</efbc:StatisticsNumeric></efac:ReceivedSubmissionsStatistics><efac:SettledContract><cbc:ID>CON-4807</cbc:ID></efac:SettledContract><efac:TenderLot><cbc:ID>LOT-4801</cbc:ID></efac:TenderLot></efac:LotResult><efac:LotTender><cbc:ID>TEN-7542</cbc:ID><efbc:TenderRankedIndicator>false</efbc:TenderRankedIndicator><efbc:TenderVariantIndicator>false</efbc:TenderVariantIndicator><cac:LegalMonetaryTotal><cbc:PayableAmount currencyID="EUR">990099.01</cbc:PayableAmount></cac:LegalMonetaryTotal><efac:SubcontractingTerm><efbc:TermCode listName="applicability">no</efbc:TermCode></efac:SubcontractingTerm><efac:TenderingParty><cbc:ID>TPA-5188</cbc:ID></efac:TenderingParty><efac:TenderLot><cbc:ID>LOT-4801</cbc:ID></efac:TenderLot><efac:TenderReference><cbc:ID>Onto Innovation</cbc:ID></efac:TenderReference></efac:LotTender><efac:SettledContract><cbc:ID>CON-4807</cbc:ID><cbc:IssueDate>2026-09-22+02:00</cbc:IssueDate><cbc:Title languageID="DEU">Supply Contract</cbc:Title><efac:ContractReference><cbc:ID>Silicon Austria Labs – Automated Spectroscopic Ellipsometer</cbc:ID></efac:ContractReference><efac:LotTender><cbc:ID>TEN-7542</cbc:ID></efac:LotTender></efac:SettledContract><efac:TenderingParty><cbc:ID>TPA-5188</cbc:ID><efac:Tenderer><cbc:ID>ORG-0354</cbc:ID></efac:Tenderer></efac:TenderingParty></efac:NoticeResult><efac:NoticeSubType><cbc:SubTypeCode listName="notice-subtype">29</cbc:SubTypeCode></efac:NoticeSubType><efac:Organizations><efac:Organization><efac:Company><cbc:WebsiteURI>https://silicon-austria-labs.com</cbc:WebsiteURI><cac:PartyIdentification><cbc:ID>ORG-6231</cbc:ID></cac:PartyIdentification><cac:PartyName><cbc:Name languageID="DEU">Silicon Austria Labs GmbH</cbc:Name></cac:PartyName><cac:PostalAddress><cbc:StreetName>Sandgasse 34</cbc:StreetName><cbc:CityName>Graz</cbc:CityName><cbc:PostalZone>8010</cbc:PostalZone><cbc:CountrySubentityCode listName="nuts">AT221</cbc:CountrySubentityCode><cac:Country><cbc:IdentificationCode listName="country">AUT</cbc:IdentificationCode></cac:Country></cac:PostalAddress><cac:PartyLegalEntity><cbc:CompanyID>9110023950495</cbc:CompanyID></cac:PartyLegalEntity><cac:Contact><cbc:Name>Schramm &#214;hler Rechtsanw&#228;lte GmbH, zH RA Mag. David Melingo und RA Mag. Christian Gruber, Bartensteingasse 2, 1010 Wien</cbc:Name><cbc:Telephone>+43 1 409 76 090</cbc:Telephone><cbc:ElectronicMail>kanzlei@schramm-oehler.at</cbc:ElectronicMail></cac:Contact></efac:Company></efac:Organization><efac:Organization><efac:Company><cbc:WebsiteURI>https://www.bvwg.gv.at/</cbc:WebsiteURI><cac:PartyIdentification><cbc:ID>ORG-4472</cbc:ID></cac:PartyIdentification><cac:PartyName><cbc:Name languageID="DEU">Bundesverwaltungsgericht</cbc:Name></cac:PartyName><cac:PostalAddress><cbc:StreetName>Erdbergstra&#223;e 192-196</cbc:StreetName><cbc:CityName>Wien</cbc:CityName><cbc:PostalZone>1030</cbc:PostalZone><cbc:CountrySubentityCode listName="nuts">AT130</cbc:CountrySubentityCode><cac:Country><cbc:IdentificationCode listName="country">AUT</cbc:IdentificationCode></cac:Country></cac:PostalAddress><cac:PartyLegalEntity><cbc:CompanyID>9110008059823</cbc:CompanyID></cac:PartyLegalEntity><cac:Contact><cbc:Telephone>+43 160149</cbc:Telephone><cbc:ElectronicMail>einlaufstelle@bvwg.gv.at</cbc:ElectronicMail></cac:Contact></efac:Company></efac:Organization><efac:Organization><efbc:ListedOnRegulatedMarketIndicator>false</efbc:ListedOnRegulatedMarketIndicator><efac:Company><cbc:WebsiteURI>https://www.canon-europe.com/</cbc:WebsiteURI><cac:PartyIdentification><cbc:ID>ORG-0354</cbc:ID></cac:PartyIdentification><cac:PartyName><cbc:Name languageID="DEU">Onto Innovation</cbc:Name></cac:PartyName><cac:PostalAddress><cbc:StreetName>Jonspin Road 16</cbc:StreetName><cbc:CityName>Wilmington</cbc:CityName><cbc:PostalZone>01887</cbc:PostalZone><cbc:CountrySubentityCode listName="nuts">AT211</cbc:CountrySubentityCode><cac:Country><cbc:IdentificationCode listName="country">AUT</cbc:IdentificationCode></cac:Country></cac:PostalAddress><cac:PartyLegalEntity><cbc:CompanyID>1</cbc:CompanyID></cac:PartyLegalEntity><cac:Contact><cbc:Telephone>+1 9782536200</cbc:Telephone><cbc:ElectronicMail>info@ontoinnovation.com</cbc:ElectronicMail></cac:Contact></efac:Company></efac:Organization></efac:Organizations></efext:EformsExtension></ext:ExtensionContent></ext:UBLExtension></ext:UBLExtensions><cbc:UBLVersionID>2.3</cbc:UBLVersionID><cbc:CustomizationID>eforms-sdk-1.12</cbc:CustomizationID><cbc:ID schemeName="notice-id">7b86aa5d-1fc2-49a8-85c9-61a802a8d8b9</cbc:ID><cbc:ContractFolderID>8f0bcb7a-ed45-41b5-af0e-5d729eeb37c8</cbc:ContractFolderID><cbc:IssueDate>2026-10-15+02:00</cbc:IssueDate><cbc:IssueTime>14:34:00+02:00</cbc:IssueTime><cbc:VersionID>01</cbc:VersionID><cbc:RegulatoryDomain>32014L0024</cbc:RegulatoryDomain><cbc:NoticeTypeCode listName="result">can-standard</cbc:NoticeTypeCode><cbc:NoticeLanguageCode listName="language">DEU</cbc:NoticeLanguageCode><cac:ContractingParty><cac:ContractingPartyType><cbc:PartyTypeCode listName="buyer-legal-type">pub-undert-cga</cbc:PartyTypeCode></cac:ContractingPartyType><cac:ContractingActivity><cbc:ActivityTypeCode listName="authority-activity">education</cbc:ActivityTypeCode></cac:ContractingActivity><cac:Party><cac:PartyIdentification><cbc:ID>ORG-6231</cbc:ID></cac:PartyIdentification></cac:Party></cac:ContractingParty><cac:TenderingProcess><cbc:ProcedureCode listName="procurement-procedure-type">neg-w-call</cbc:ProcedureCode><cac:ProcessJustification><cbc:ProcessReasonCode listName="accelerated-procedure">false</cbc:ProcessReasonCode></cac:ProcessJustification></cac:TenderingProcess><cac:ProcurementProject><cbc:ID>1</cbc:ID><cbc:Name languageID="DEU">Silicon Austria Labs – Automated Spectroscopic Ellipsometer</cbc:Name><cbc:Description languageID="DEU">The aim of this procurement procedure was to award the contract to the best bidder identified during the procurement procedure for the supply, installation, commissioning and services (such as trainings) of an Automated Spectroscopic Ellipsometer (ASE) for Silicon Austria Labs GmbH.</cbc:Description><cbc:ProcurementTypeCode listName="contract-nature">supplies</cbc:ProcurementTypeCode><cbc:Note languageID="DEU">It should be noted that the stated “value excluding VAT” here and below is based on the price of the Automated Spectroscopic Ellipsometer (ASE) including delivery, installation, commissioning, training. This total value is therefore composed of the total price of the tool in the amount of EUR 990,099.01 (USD 1,150,000.00) presently retrieved. Moreover, due to technical reasons the bidder’s country of establishment cannot be selected in Section IV, as the system requires a European NUTS-Code to be entered. The bidder “Onto Innovation” is in fact established in the United States of America. The indication of an austrian NUTS-Code in Section IV is therefore solely attributable to the technical limitations of the procurement platform and does not reflect the bidder’s actual place of establishment.</cbc:Note><cac:RequestedTenderTotal><cbc:EstimatedOverallContractAmount currencyID="EUR">990099.01</cbc:EstimatedOverallContractAmount></cac:RequestedTenderTotal><cac:MainCommodityClassification><cbc:ItemClassificationCode listName="cpv">38000000</cbc:ItemClassificationCode></cac:MainCommodityClassification></cac:ProcurementProject><cac:ProcurementProjectLot><cbc:ID schemeName="Lot">LOT-4801</cbc:ID><cac:TenderingTerms><cbc:FundingProgramCode listName="eu-funded">eu-funds</cbc:FundingProgramCode><cac:AwardingTerms><cac:AwardingCriterion><cac:SubordinateAwardingCriterion><ext:UBLExtensions><ext:UBLExtension><ext:ExtensionContent><efext:EformsExtension><efac:AwardCriterionParameter><efbc:ParameterCode listName="number-weight">poi-exa</efbc:ParameterCode><efbc:ParameterNumeric>15</efbc:ParameterNumeric></efac:AwardCriterionParameter></efext:EformsExtension></ext:ExtensionContent></ext:UBLExtension></ext:UBLExtensions><cbc:AwardingCriterionTypeCode listName="award-criterion-type">quality</cbc:AwardingCriterionTypeCode><cbc:Description languageID="DEU">Commitment to target requirements</cbc:Description></cac:SubordinateAwardingCriterion><cac:SubordinateAwardingCriterion><ext:UBLExtensions><ext:UBLExtension><ext:ExtensionContent><efext:EformsExtension><efac:AwardCriterionParameter><efbc:ParameterCode listName="number-weight">poi-exa</efbc:ParameterCode><efbc:ParameterNumeric>20</efbc:ParameterNumeric></efac:AwardCriterionParameter></efext:EformsExtension></ext:ExtensionContent></ext:UBLExtension></ext:UBLExtensions><cbc:AwardingCriterionTypeCode listName="award-criterion-type">quality</cbc:AwardingCriterionTypeCode><cbc:Description languageID="DEU">Delivery and installation period</cbc:Description></cac:SubordinateAwardingCriterion><cac:SubordinateAwardingCriterion><ext:UBLExtensions><ext:UBLExtension><ext:ExtensionContent><efext:EformsExtension><efac:AwardCriterionParameter><efbc:ParameterCode listName="number-weight">poi-exa</efbc:ParameterCode><efbc:ParameterNumeric>15</efbc:ParameterNumeric></efac:AwardCriterionParameter></efext:EformsExtension></ext:ExtensionContent></ext:UBLExtension></ext:UBLExtensions><cbc:AwardingCriterionTypeCode listName="award-criterion-type">quality</cbc:AwardingCriterionTypeCode><cbc:Description languageID="DEU">Warranty of functionality period</cbc:Description></cac:SubordinateAwardingCriterion><cac:SubordinateAwardingCriterion><ext:UBLExtensions><ext:UBLExtension><ext:ExtensionContent><efext:EformsExtension><efac:AwardCriterionParameter><efbc:ParameterCode listName="number-weight">poi-exa</efbc:ParameterCode><efbc:ParameterNumeric>50</efbc:ParameterNumeric></efac:AwardCriterionParameter></efext:EformsExtension></ext:ExtensionContent></ext:UBLExtension></ext:UBLExtensions><cbc:AwardingCriterionTypeCode listName="award-criterion-type">price</cbc:AwardingCriterionTypeCode><cbc:Description languageID="DEU">Price of the device incl. delivery, installation, commissioning, training</cbc:Description></cac:SubordinateAwardingCriterion></cac:AwardingCriterion></cac:AwardingTerms><cac:AppealTerms><cac:PresentationPeriod><cbc:Description languageID="DEU">See &#167; 343 BVergG 2018.</cbc:Description></cac:PresentationPeriod><cac:AppealReceiverParty><cac:PartyIdentification><cbc:ID>ORG-4472</cbc:ID></cac:PartyIdentification></cac:AppealReceiverParty></cac:AppealTerms></cac:TenderingTerms><cac:TenderingProcess><cbc:GovernmentAgreementConstraintIndicator>true</cbc:GovernmentAgreementConstraintIndicator><cac:AuctionTerms><cbc:AuctionConstraintIndicator>false</cbc:AuctionConstraintIndicator></cac:AuctionTerms><cac:ContractingSystem><cbc:ContractingSystemTypeCode listName="framework-agreement">none</cbc:ContractingSystemTypeCode></cac:ContractingSystem><cac:ContractingSystem><cbc:ContractingSystemTypeCode listName="dps-usage">none</cbc:ContractingSystemTypeCode></cac:ContractingSystem></cac:TenderingProcess><cac:ProcurementProject><cbc:ID>1</cbc:ID><cbc:Name languageID="DEU">Silicon Austria Labs – Automated Spectroscopic Ellipsometer</cbc:Name><cbc:Description languageID="DEU">The aim of this procurement procedure was to award the contract to the best bidder identified during the procurement procedure for the supply, installation, commissioning and services (such as trainings) of an Automated Spectroscopic Ellipsometer (ASE) for Silicon Austria Labs GmbH.</cbc:Description><cbc:ProcurementTypeCode listName="contract-nature">supplies</cbc:ProcurementTypeCode><cbc:Note languageID="DEU">The information under point “Duration of the contract, framework agreement or dynamic procurement system” was only provided because it is a mandatory field. In fact, a supply contract is concluded, which generally ends with the delivery, installation, commissioning, training and acceptance. The actual term will therefore only be determined after installation, commissioning and acceptance.</cbc:Note><cac:RequestedTenderTotal><cbc:EstimatedOverallContractAmount currencyID="EUR">990099.01</cbc:EstimatedOverallContractAmount></cac:RequestedTenderTotal><cac:MainCommodityClassification><cbc:ItemClassificationCode listName="cpv">38000000</cbc:ItemClassificationCode></cac:MainCommodityClassification><cac:RealizedLocation><cbc:Description languageID="DEU">Cleanroom</cbc:Description><cac:Address><cbc:StreetName>Europastra&#223;e 12</cbc:StreetName><cbc:CityName>Villach</cbc:CityName><cbc:PostalZone>9524</cbc:PostalZone><cbc:CountrySubentityCode listName="nuts">AT211</cbc:CountrySubentityCode><cac:Country><cbc:IdentificationCode listName="country">AUT</cbc:IdentificationCode></cac:Country></cac:Address></cac:RealizedLocation><cac:PlannedPeriod><cbc:StartDate>2026-09-22+02:00</cbc:StartDate><cbc:DurationMeasure unitCode="MONTH">2</cbc:DurationMeasure></cac:PlannedPeriod><cac:ContractExtension><cbc:OptionsDescription languageID="DEU">All optional items marked as such in the Specifications – Part C are offered as part of the final offer and are included in the offered price.</cbc:OptionsDescription></cac:ContractExtension></cac:ProcurementProject></cac:ProcurementProjectLot><cac:TenderResult><cbc:AwardDate>2000-01-01Z</cbc:AwardDate></cac:TenderResult></urn:ContractAwardNotice>