<P>Silicon Austria Labs – Chips JU: Plasma enhanced atomic layer deposition (PE-ALD)</P>

Silicon Austria Labs GmbH9110023950495+43 14097609kanzlei@schramm-oehler.atSchramm Öhler Rechtsanwälte GmbH, zH RA Mag. David Melingo und RA Mag. Christian Gruber, Bartensteingasse 2, 1010 Wienhttps://steiermark.vergabeportal.at/Detail/214121https://steiermark.vergabeportal.at/Detail/214121<P>Silicon Austria Labs – Chips JU: Plasma enhanced atomic layer deposition (PE-ALD)</P> 1

The aim of this procurement procedure is to award the contract to the best bidder identified during the procurement procedure for the supply, installation and commissioning of an atomic layer deposition tool in a cluster configuration to fabricate various thin films as well as related services such as trainings, for Silicon Austria Labs GmbH.

Cleanroom

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